An Investigation of Nonuniform Dose Deposition From an Electron Beam
Abstract
in a search for an explanation of nonuniform electron-beam dose deposition, the integrated TIGER Series (ITS) of coupled electron/photon Monte Carlo transport codes was used to calculate energy deposition in the package materials of an application-specific integrated circuit (ASIC) while the thicknesses of some of the materials were varied. The thicknesses of three materials that were in the path of an electron-beam pulse were varied independently so that analysis could determine how the radiation dose measurements using thermoluminescent dosimeters (TLD's) would be affected. The three materials were chosen because they could vary during insertion of the die into the package or during the process of taking dose measurements. The materials were aluminum, HIPEC (a plastic), and silver epoxy. The calculations showed that with very small variations in thickness, the silver epoxy had a large effect on the dose uniformity over the area of the die. IC Package effects, Nonuniform dose deposition, Electron beam
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1994
- Accession Number
- ADA284175
Entities
People
- Kieu X. Luu
- William Lilley
Organizations
- United States Army Research Laboratory