Materials Processing and Manufacturing Technologies for Diamond Substrates Multichip Modules

Abstract

In this quarter we have continued our baseline program to optimize the throughput of diamond in conventional chemistries, achieving the target 1 g/ hr of deposition at 75 kW, completed modifications to the AX6600 substrate stage allowing full power operation on a continuous basis, continued work on release techniques using novel materials for successful production of free standing 6 inch diameter diamond, constructed a thermal conductivity test stand for quality measurements on free standing diamond films.

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Document Details

Document Type
Technical Report
Publication Date
Aug 15, 1994
Accession Number
ADA285060

Entities

People

  • Evelio Sevillano

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Conductivity
  • Control Systems
  • Diameters
  • Diamond Films
  • Fabrication
  • Films
  • Materials
  • Materials Processing
  • Measurement
  • Microwave Transmission
  • Power Levels
  • Substrates
  • Temperature Control
  • Test Stands
  • Thermal Conductivity
  • Transmission Lines

Readers

  • Combustion and Flow Dynamics.
  • Surface Engineering/Surface Coating Technology.
  • Systems Analysis and Design