Ceramic/Metal Composite CIrcuit-Board-Level Technology for Application Specific Electronic Modules (ASEMs)
Abstract
Most of the major elements of the LTCC-M technology have been developed, and all have been shown to be compatible. The development of the green tape ceramic has been completed. The materials and processing have been developed to fire this green tape to a Cu/Mo/Cu metal core such that a very dense ceramic is formed with zero lateral (x-y plane) shrinkage. Thick film conductors have been developed for use with this tape. The process for mass fabrication of electrical feedthroughs in the Cu/Mo/Cu core has been successfully extended to laser drilled holes as small as 7 mils in diameter. Additionally, thin film overlays with a photosensitive BCB (from Dow Chemical) dielectric have been deposited on top of the fired ceramic
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 21, 1994
- Accession Number
- ADA285066
Entities
People
- Barry J. Thaler
Organizations
- Sarnoff Corporation