Epitaxial Liftoff Technology Onto Processed Silicon Foundry Wafers

Abstract

Technical Objectives: Research the application of liftoff transfer of epitaxial material to foreign substrates including: surface chemistry; electrical, mechanical, thermal and optical properties of Van der Waals bonded materials. III-V devices bonded to silicon circuitry and to other substrates with enhanced optical, electrical or thermal properties, integrated optical devices incorporating lifted-off material and/or devices with LiNbO$ sub 3$, glass or other substrates.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 31, 1994
Accession Number
ADA285621

Entities

People

  • Eli Yablonovitch

Organizations

  • University of California, Los Angeles

Tags

DTIC Thesaurus Topics

  • Bipolar Junction Transistors
  • Chemistry
  • Efficiency
  • Electrical Engineering
  • Electronics Laboratories
  • Films
  • Heterojunction Bipolar Transistors
  • Heterojunctions
  • Light Emitting Diodes
  • Light Sources
  • Materials
  • Optical Properties
  • Optoelectronic Devices
  • Physical Properties
  • Quantum Efficiency
  • Semiconductors
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.