Epitaxial Liftoff Technology Onto Processed Silicon Foundry Wafers
Abstract
Technical Objectives: Research the application of liftoff transfer of epitaxial material to foreign substrates including: surface chemistry; electrical, mechanical, thermal and optical properties of Van der Waals bonded materials. III-V devices bonded to silicon circuitry and to other substrates with enhanced optical, electrical or thermal properties, integrated optical devices incorporating lifted-off material and/or devices with LiNbO$ sub 3$, glass or other substrates.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 31, 1994
- Accession Number
- ADA285621
Entities
People
- Eli Yablonovitch
Organizations
- University of California, Los Angeles