Methodology for ESCA Analysis of Electromigration

Abstract

This preliminary investigation examines the feasibility of using Electron Spectroscopy for Chemical Analysis (ESCA) to monitor electromigration in thin films. Because of the requirements of both the ESCA technique and the requisite in situ electromigration, the experimental methods are quite exacting. We report here designs and experimental methodology to permit the examination of electromigration with ESCA and suggest appropriate avenues for future research. Electromigration, Electron Spectroscopy for Chemical Analysis, ESCA

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1994
Accession Number
ADA286229

Entities

People

  • Peter Grach
  • Yolanda J. Kime

Organizations

  • State University of New York

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Ceramic Matrix Composites
  • Chemical Analysis
  • Command And Control
  • Composite Materials
  • Computer Science
  • Crystals
  • Current Density
  • Electron Spectroscopy
  • Electrons
  • Films
  • Grain Boundaries
  • Materials
  • Measurement
  • Reliability
  • Spectroscopy
  • Thin Films

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene