Development of HTS SNS Devices on Large Area Substrates by Single Source MOCVD.
Abstract
A novel, single-source metalorganic chemical vapor deposition (SSMOCVD) technique has shown exceptional promise for the growth of epitaxial oxide films and multilayers on large area substrates, as needed for the commercial-scale production of high temperature superconductor devices and circuits. In this contract the SSMOCVD technique was applied to growth of YBa2Cu3O(7-x) and CaRuO3 films and multilayers for the fabrication of superconductor-normal-superconductor Josephson junctions. A process was developed for the growth of epitaxial CaRuO3 films by SSMOCVD, which was the first reported growth of CaRuO3 by MOCVD. Also, a process was developed for the in situ growth of epitaxial YBa2Cu3O(7-x)/CaRuO3 multilayers by SSMOCVD. Finally, epitaxial SNS edge junctions were fabricated and tested which used a top YBCO/CaRuO3 bilayer grown in situ by SSMOCVD and a base SrTiO3/YBa2Cu3O(7-x) bilayer grown in situ by pulsed laser ablation.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 18, 1994
- Accession Number
- ADA288601
Entities
People
- J. K. Truman