Fabrication of Long Wavelength Array by In-Situ Molecular Beam Epitaxy.
Abstract
During this reporting period, we have completed the preparation of remaining effusion cells and associated fixtures. The molecular beam fluxes of the source materials (In, Sb, and As) have been calibrated with respect to cell temperatures. The optimized process of fluoride buffer epilayer has been started and is underway. In addition, we have designed the sample and mask carriers for the array fabrication by in-situ MBE.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1994
- Accession Number
- ADA288724