Surface Damage Effects Generated by a Fast-Pulse Laser Beam.

Abstract

A fast-pulse laser was used to induce damage on the surface of a polished silicon wafer. Effects of focused-laser heating at threshold for damage were examined with high-resolution imaging microscopes. The extent and characteristics of various ripple structure were measured with an atomic force microscope.

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Document Details

Document Type
Technical Report
Publication Date
Dec 06, 1994
Accession Number
ADA289131

Entities

People

  • E. F. Gabl
  • J. H. Konnert
  • P. G. Burkhalter

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Damage
  • Electromagnetic Radiation
  • Electron Microscopes
  • Elementary Fermions
  • Elementary Particles
  • Fermions
  • High Resolution
  • Laser Beams
  • Laser Damage
  • Lasers
  • Microscopes
  • Military Research
  • Radiation
  • Subatomic Particles
  • Surface Roughness
  • Tubular Structures
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy