Nanocrystalline Processing and Interface Engineering of Si3N4-Based Ceramics.
Abstract
During the past three months, our efforts have been devoted to synthesizing nanocrystalline Si3N4 and Y2O3. For nanocrystalline Si3N4, a tubular reactor design has been adopted to produce nanoclusters by inert gas condensation in a forced flux flow. This reactor involves various features that allow us to control the synthesis conditions. Evaporation of Si takes place in a cruible located near one end of the reactor. A gas flow is established through the use of a booster pump to bring the nanoclusters generated quickly out of the hot growth zone to prevent particle agglomeration. The nanometer-sized particles are deposited on a liquid-nitrogen cooled flat plate at the other end of the reactor through thermophoresis. (MM)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 30, 1994
- Accession Number
- ADA291302
Entities
People
- Jackie Y. Ying
Organizations
- Massachusetts Institute of Technology