Investigation of the Characteristics of Ferroelectric Thin Films Deposited by Pulsed Laser Ablation.

Abstract

Ferroelectric thin films of barium strontium titanate (BSTO) have been deposited on bare and metallized substrates by the pulsed laser ablation method under different oxygen ambients (150 mT and 50 mT). Under an oxygen pressure of 150 mT, the film composition was similar to that of its ablation target composition, viz. Ba(0.6)Sr(0.4)TiO3. However, when the films were deposited under the lower oxygen pressure, x-ray diffraction studies showed the presence of a secondary phase. The electrical characteristics of the films were measured to examine the effect of the stoichiometry on the dielectric constant and tunability. jg

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1994
Accession Number
ADA292306

Entities

People

  • D. P. Vijay
  • N. Sonnenberg
  • S. B. Desu
  • Surojeet Sengupta

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ablation
  • Air Force
  • Chemistry
  • Dielectric Permittivity
  • Diffraction
  • Engineering
  • Films
  • Lasers
  • Materials
  • Materials Science
  • Measurement
  • Military Research
  • Partial Pressure
  • Pulsed Lasers
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition