The IEEE Workshop on Micro-Electro-Mechanical Systems Held in Oiso, Japan on 25-28 January 1994.
Abstract
The 7th International Workshop on Micro-Electro-Mechanical Systems, sponsored by the IEEE Robotics and Automation Society, was held 25-29 January 94 in Oiso, Japan. During this 3 day workshop, there were a total of 63 papers presented, consisting of 38 oral and 25 poster papers. Topics covered in this workshop were fabrication, sensor, actuator, device/system, and micro-robotics technologies of millimeter to micrometer-size electromechanical devices. One interesting paper presented in this workshop dealt with the fabrication of micro-actuators using magnetorestrictive thin films. The basic idea of the paper was to create actuator motion by making use of magnetorestrictive materials, consisting of amorphous Th-Fe and Sm-Fe on a polymide film. It used the electromagnetic force, rather than more traditional electrostatic force. The paper reported the large deflection in cantilever actuator movement, implying the great potential for the future use of magnetorestrictive actuation devices for achieving millimeter size actuator motion. As a whole, the workshop was organized well and there were very interesting papers presented in this workshop, resulting in invigorating discussions during the question and answer period.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 28, 1994
- Accession Number
- ADA292393
Entities
People
- S. J. Yakura