An Analysis of Gas Phase Ethanol/Water Chemistry for Diamond CVD,

Abstract

Chemical kinetics calculations have been carried out on ethanol (EtOH)water mixtures at a range of temperatures, pressures snd EtOH/H2O ratios. The results show that the mole fractions of many chemical species depend very sensitively on the initial EtOH/H20 ratio and diverge sharply after an induction time which depends both on pressure and temperature. We explain this divergence primarily in terms of the stability of carbon monoxide and show that the rate-limiting steps that dictate the induction time are the molecular hydrogen dissociation reactions. Our calculations also predict the dependence of the concentrations of potential growth (C, CH3, C2H2) and etching (O, OH, O2) species for diamond chemical vapor deposition (CVD) on operating conditions. jg

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Mar 29, 1995
Accession Number
ADA293009

Entities

People

  • Charles K Westbrook
  • Richard C. Devore
  • Robert S. Sinkovits
  • Vasgen A. Shamamian

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • C4I
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Alcohols
  • Carbon Monoxide
  • Chemical Compounds
  • Chemical Kinetics
  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Combustion
  • Dielectric Gases
  • Dissociation
  • Gases
  • High Temperature
  • Materials Science
  • Vapor Deposition
  • Water Chemistry

Readers

  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.
  • Toxicology/Environmental Toxicology