Low Voltage Electron Beam Lithography.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1995
Accession Number
ADA293396

Entities

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Current Density
  • Electron Beam Lithography
  • Electron Beams
  • Electron Energy
  • Electron Optics
  • Electrons
  • Emission
  • Energy
  • Lithography
  • Low Voltage
  • Materials
  • Photocathodes
  • Secondary Emission
  • Voltage

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene