Ion-Assisted Deposition of Optical Thin Films at Different Ion Beam Energies,
Abstract
This article, using TiO2 thin films as examples, studied and analyzed the optical properties, laser damage threshold values, and microstructures of thin films associated with ion assisted sedimentation at different energies. jg
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 11, 1995
- Accession Number
- ADA294179
Entities
People
- Fan Ruiying
- Lu Yuemei
Organizations
- National Air and Space Intelligence Center