Measurement and Analysis of Properties of Several Types of Films Doped with Oxides.

Abstract

This article introduces several types of experimental equipment associated with the measurement of stress, absorption, and scattering in thin films. It makes use of these systems to carry out measurements and tests on such characteristics as stress, absorption, scattering, focusing density, and so on, in a number of common oxides and their doping films. At the same time, with the help of Auger energy spectra techniques and X-ray diffraction technology, it analyzes the chemical constituents and crystal structure of films, obtaining a number of significant results. jg

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Document Details

Document Type
Technical Report
Publication Date
Apr 05, 1995
Accession Number
ADA294180

Entities

People

  • Chen Yuming
  • Gu Peifu
  • Tang Jinfa

Organizations

  • National Air and Space Intelligence Center

Tags

DTIC Thesaurus Topics

  • Absorption
  • Crystal Structure
  • Crystals
  • Diffraction
  • Elements
  • Energy
  • Films
  • Materials
  • Measurement
  • Mechanical Properties
  • Oxide Films
  • Reflection
  • Scattering
  • Spectra
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Systems Analysis and Design