Compact, Self-Contained ArF Laser.
Abstract
The goal of this project was development of a miniature ArF laser and associated miniature gas handling apparatus. In the first year we improved performance of a waveguide ArF laser by redesigning the microwave power delivery system, quantified the effects of oxygen in the laser discharge, and designed a miniaturized gas supply. In the second year. we developed a miniature ArF laser of more conventional design that produced mW of average power at a pulse repetition rate of 100 Hz. jg
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 04, 1995
- Accession Number
- ADA294510
Entities
People
- C. P. Christensen