Low Temperature Growth of Thin Films by High Kinetic Energy Supersonic Molecular Beams.

Abstract

This grant initiated our work in low temperature deposition by supersonic jets. The attached draft manuscript details our work in growing GaAs thin films by jets of a single-source precursor and suggest that rapid growth and very smooth films can be attained. jg

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Document Details

Document Type
Technical Report
Publication Date
Feb 24, 1995
Accession Number
ADA294516

Entities

People

  • Abdelkrim Sellidj
  • Charles B. Mullins

Organizations

  • University of Texas at Austin

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Base Pressure
  • Chemical Engineering
  • Engineering
  • Epitaxial Growth
  • Films
  • Information Operations
  • Kinetic Energy
  • Low Temperature
  • Mass Spectrometers
  • Materials
  • Molecular Beams
  • Molecules
  • Precursors
  • Substrates
  • Surface Roughness
  • Thin Films
  • Vapor Pressure

Fields of Study

  • Physics

Readers

  • Combustion and Flow Dynamics.
  • Semiconductor Device Technology
  • Technical Research and Report Writing.

Technology Areas

  • Hypersonics