Designing Resist Materials for Microlithography.
Abstract
The design of resist materials for microlithography has become more and more complex due to the ever increasing number of demands that are placed on these materials . In particular it is difficult to introduce new features or new chemistries in resists while still maintaining the 'look and feel' and traditional behavior of well established materials. This presentation focuses on the chemistry of resists based on chemically amplified processes that are readily implemented in novel high performance materials. Both positive-tone and negative-tone imaging schemes are considered as is the development of environmentally friendly materials that obviate the use of organic solvents and can be coated and processed in a fully aqueous system. The importance of a full understanding of the the reactions mechanisms that regulate the performance of the resist is underlined.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1995
- Accession Number
- ADA294537
Entities
People
- Edward J. Urankar
- Jean M. Frechet
- Jennifer M. Havard
- Sang-yeon Shim
- Seung Mok Lee
Organizations
- Cornell University Department of Chemistry and Chemical Biology