Thickness Distribution Measurement of Thin Films.

Abstract

Two calculated methods of film thickness of non cosine distribution and two measuring methods based on Fabry-Perot metal dielectric filters were presented. Some calculations and measurements were shown. (AN)

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Document Details

Document Type
Technical Report
Publication Date
May 05, 1995
Accession Number
ADA294727

Entities

People

  • Peifu Gu

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Intelligence
  • Electron Beams
  • Equations
  • Evaporation
  • Films
  • Light Sources
  • Materials
  • Measurement
  • Microfiche
  • Peak Values
  • Refractive Index
  • Scattering
  • Substrates
  • Thickness
  • Thin Films
  • Translations

Fields of Study

  • Physics

Readers

  • Approximation Theory.
  • Plasma Physics.
  • Thin Film Deposition Science.