Thin Solid Films, Open PDF Document Details Document Type Technical Report Publication Date Mar 25, 1993 Accession Number ADA295545 Entities People Salah M. Bedair Organizations University of Illinois Urbana–Champaign Tags Communities of Interest Advanced Electronics Energy and Power Technologies Ground and Sea Platforms DTIC Thesaurus Topics Chemical Analysis Chemical Reactions Chemical Synthesis Chemical Vapor Deposition Chemistry Compound Semiconductors Electronics Industry Electronics Laboratories Materials Processing Materials Science Materials Testing Measurement Modules (Electronics) Optics Power Electronics Quantum Wells Semiconductors