Low Voltage Electron Beam Lithography.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1995
Accession Number
ADA296625

Entities

People

  • Weidong Liu

Organizations

  • Stanford University

Tags

DTIC Thesaurus Topics

  • Electron Beam Lithography
  • Electron Beams
  • Electrons
  • Lithography
  • Lithography (Fabrication)
  • Low Voltage
  • Reproduction (Copying)
  • Voltage

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene