Interface Properties of Wide Bandgap Semiconductor Structures.
Abstract
Heteroepitaxy is the growth of a crystal (or a film) on a foreign crystalline substrate that determines its orientation. While the potential of heteroepitaxial deposition has been demonstrated, significant advances in theoretical understanding, experimental growth and control of this growth, and characterization are required to exploit the capabilities of this process route. The materials of concern in this report are classified as wide bandgap semiconductors and include diamond, SiC and the III-V nitrides of Al, Ga, and In and their alloys. The extremes in electronic and thermal properties of diamond and SiC allow the types and numbers of current and conceivable applications of these materials to be substantial. However, a principal driving force for the interest in the III-V nitrides is their potential for solid-state optoelectronic devices for light emission and detection from the visible through the far ultraviolet range of the spectrum. The principal objectives of the research program are (1) the fundamental physical and chemical processes ongoing at the substrate surface and substrate/film interface during the heteroepitaxial deposition of both monocrystalline films of the materials noted above, as well as metal contacts on these materials, (2) the mode of nucleation and growth of the materials noted in (1) on selected substrates and on each other in the fabrication of multilayer heterostructures, (3) the resulting properties of the individual films and the layered structures and the effect of interfacial defects on these properties, (4) the development and use of theoretical concepts relevant to the research in objectives (1-3) to assist in the fabrication of improved films and structures.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1995
- Accession Number
- ADA296864
Entities
People
- J. Bernholc
- J. T. Glass
- Robert F Davis
- Robert J. Nemanich
- Sarah S. Bedair
Organizations
- North Carolina State University