Tunneling Acoustic Microscopy.

Abstract

The objectives of this research are to develop ultrasonic sensors and actuators using silicon micro machining, and to develop theoretical models of the behavior of these devices. A number of applications are envisaged in the fields of in-situ sensors, ranging, hydrophones, sensors for scanning atomic tips in imaging and lithography, and non destructive evaluation. (MM)

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Document Details

Document Type
Technical Report
Publication Date
Jul 20, 1995
Accession Number
ADA297588

Entities

People

  • B. T. Khuri-yakub

Organizations

  • Stanford University

Tags

DTIC Thesaurus Topics

  • Actuators
  • Detectors
  • Fabrication
  • Hydrophones
  • Lithography
  • Machining
  • Manufacturing
  • Microscopy
  • Quantum Tunneling
  • Scanning
  • Test And Evaluation
  • Transducers
  • Tunneling

Fields of Study

  • Physics

Readers

  • Acoustical Oceanography.
  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.