Commercialize an Atomic Absorption System Based on Frequency-Doubled Tunable Diode Lasers for Rate Monitoring, Process Control and Spectroscopy of Physical Vapor Deposition,
Abstract
The contracted program to develop an atomic absorption vapor monitoring system began as scheduled on 9/1/94. Initial efforts focused on spectroscopic monitoring of low density yttrium vapor using a fundamental frequency laser. A test-bed system for frequency doubling was assembled. Parts were ordered for the construction of the prototype system. jg p.2
Document Details
- Document Type
- Technical Report
- Publication Date
- May 31, 1995
- Accession Number
- ADA299180
Entities
People
- Marc D. Levenson