Environmentally Acceptable Photoresist Processing for Integrated Circuit Manufacture.

Abstract

Tbis is the final report of work carried out on Contract No. NOO()14-94-C-()235, Environmentally Acceptable Photoresist Processing for Integrated Circuit Manufacture.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 1995
Accession Number
ADA299752

Entities

People

  • Paula M. Wetmore

Tags

Communities of Interest

  • Advanced Electronics
  • Biomedical

DTIC Thesaurus Topics

  • Blood Substitutes
  • Carbon Carbon Composites
  • Chemical Synthesis
  • Chemistry
  • Electronics
  • Electronics Industry
  • Glass Transition Temperature
  • High Pressure
  • Integrated Circuits
  • Manufacturing
  • Materials
  • Materials Science
  • Photolithography
  • Polymers
  • Semiconductor Manufacturing
  • Semiconductors
  • Transition Temperature

Readers

  • Integrated Circuit Design and Technology.
  • Munitions and Ordnance Engineering
  • Technical Research and Report Writing.