Rockford Diamond Technology.
Abstract
The designs of a gas system for introducing water vapor and a photo-CVD reactor are demonstrated in this month. As mentioned in last report, water vapor has a great potential for the photon activation method. With a closed vessel, water vapor is carried by a stream of argon. The content of water vapor is adjusted and controlled by the flow rate of argon. A diamond growth reactor using pure photon activation is attractive for high purity diamond films with low energy consumption. The quality diamond films will be higher than those grown by microwave methods, in which high energy charged particles in the plasma may damage the films. Furthermore, the diamond grown in the microwave lamp were reported with highly oriented films last month. The trial for better films has not succeeded due to the overheating problem of the microwave system. The experimental work with the internal coupling will be done and studied systematically next month.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 20, 1995
- Accession Number
- ADA300305