International Conference on Ion Beam Analysis (12th): Panel on In Situ Process Monitoring was held in Tempe, Arizona on May 22-26, 1995.

Abstract

The 12th International Conference on Ion Beam Analysis was held at Arizona State University, Tempe, AZ from 22.26 May 1995. There were 225 conference participants. The conference sessions included: Nuclear Resonance and Reaction Analysis; Ion Beam Characterization of New Materials; Particle-Induced X-ray Emission; Microbeams; Elastic Recoil Detection Analysis; Surfaces and Interfaces; Synthesis and Processing; Time of Flight and High Energy Resolution; Stopping Power and Energy Loss, and Multiple Scattering; RBS, Channeling and other IBA Techniques; Panel on Applications for In situ Process Monitoring; and Workshop on Electronic Databases for Ion Beam Analysis. Of particular note was the Panel on Applications for In situ Process Monitoring chaired by R. Reeber of the Army Research Office. The main topics covered were the Time of Flight Spectroscopy and the in situ MeV ion beam ion beam analysis.

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Document Details

Document Type
Technical Report
Publication Date
Jul 24, 1995
Accession Number
ADA300760

Entities

People

  • James W. Mayer

Organizations

  • Arizona State University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Detection
  • Detectors
  • Energy
  • Engineered Materials
  • High Energy
  • Ion Beams
  • Materials
  • Materials Processing
  • Materials Science
  • Military Research
  • Monitoring
  • Nuclear Resonance
  • Scattering
  • Spectroscopy
  • Universities
  • Workshops
  • X Rays

Fields of Study

  • Physics

Readers

  • Academic Conference Management
  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics