Virtual Prototyping Tools for Semiconductor Fabrication Equipment.
Abstract
This report documents the creation of a Virtual Prototyping software package under a Phase II SBIR study titled "Virtual Prototyping Tools for Semiconductor Fabrication Equipment". The project successfully developed and integrated software tools from a variety of disciplines (such as CAD/CAM, Fluid Dynamics, Graphics and Database Management Systems) to form a design environment for semiconductor fabrication processes/equipment. The resulting virtual prototyping environment provides the semiconductor industry with a tool for optimizing the design and operation of fabrication equipment to meet the rapidly increasing demands of the industry.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1995
- Accession Number
- ADA302007
Entities
People
- Anantha Krishnan
- S. A. Lowry
- V. J. Harrand