Laser Microchemical Processing Instrument.

Abstract

Revise Inc began a highly successful engineering rework service for prototyping and trimming of integrated circuits with it's Silicon Editor TM instrument. The Silicon Editor TM utilizes a low power solid-state laser and is designed for precise fine-line operations on 2-D VLSI. There has been very significant activity in adjustment of prototypes, for example, through customization of layer thicknesses, addition of layers, experimental in situ variation of mechanical structures, device release, and machining of the substrate bulk under surface micromachined structures. The laser processes also assists in the interconnection and packaging issues for MEMS. jg p1

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1995
Accession Number
ADA304319

Entities

People

  • Daniel Ehrlich

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Computer-Aided Design
  • Dead Reckoning
  • Detectors
  • Fabrication
  • Graphical User Interface
  • Laser Beams
  • Laser Diodes
  • Lasers
  • Manufacturing
  • Materials
  • Mechanical Structure
  • Operating Systems
  • Prototypes
  • Semiconductors
  • Three Dimensional
  • Two Dimensional

Readers

  • Integrated Circuit Design and Technology.
  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy