Theoretical Studies of Fundamental Processes in Silicon and Diamond CVD and Other Systems.
Abstract
The research progress for AFOSR grant F49620-92-0011 for the period 1 November 1991 to 31 October 1995 is described. Three main areas of research are described: Chemical vapor deposition (CVD) processes, chemistry in rare-gas matrices, and statistical versus nonstatistical effects unimolecular reactions. A wide range of studies were performed using classical trajectory methods, Monte Carlo transition-state theory, and ab initio quantum mechanical calculations. jg p1
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1996
- Accession Number
- ADA304324
Entities
People
- Donald L. Thompson
- Lionel M. Raff
Organizations
- Oklahoma State University–Stillwater