Microelectromechanical Systems; A DoD Dual Use Technology Industrial Assessment.
Abstract
Using the fabrication techniques and materials of microelectronics as a basis, MEMS processes construct both mechanical and electrical components. Mechanical components in MEMS, like transistors in microelectronics, have dimensions that are measured in microns and numbers measured from a few to millions. MEMS is not about any one single application or device, nor is it defined by a single fabrication process or limited to a few materials. More than anything else, MEMS is a fabrication approach that conveys the advantages of miniaturization, multiple components and microelectronics to the design and construction of integrated electromechanical systems. MEMS devices are and will be used widely, with applications ranging from automobiles and fighter aircraft to printers and munitions. While MEMS devices will be a relatively small fraction of the cost, size and weight of these systems, MEMS will be critical to their operation, reliability and affordability MEMS devices, and the smart products they enable, will increasingly be the performance differentiator for both defense and commercial systems. This report identifies candidate MEMS defense applications, assesses the global MEMS industry, summarizes the level of global investments in MEMS, and outlines a DoD investment strategy and action plan for MEMS. (MM)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1995
- Accession Number
- ADA304675
Entities
People
- Anita Jones
- Ken Gabriel
- Kenneth Flamm
- Linda Mareth
- Richard Van Atta
Organizations
- Office of the Director