Unconventional Systems Integration,

Abstract

This report examines some potential near term and long term applications of conventional integration in micro-electro mechanical systems (MEMs).

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1996
Accession Number
ADA310503

Entities

People

  • A. Despain
  • D. Eardley
  • D. Hammer
  • Eric B. Williams
  • W. Dally

Organizations

  • MITRE Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Sensors

DTIC Thesaurus Topics

  • Aerosol Generators
  • Aircrafts
  • Converters
  • Detection
  • Detectors
  • Fabrication
  • Heat Energy
  • Linear Accelerators
  • Manufacturing
  • Microelectromechanical Systems
  • Military Applications
  • Military Research
  • Optical Detectors
  • Remotely Piloted Vehicles
  • Resonant Frequency
  • Test And Evaluation
  • Warning Systems

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems