Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups.
Abstract
A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. The materials exhibit very high sensitivity when exposed to deep-UV light but their application as resists for microlithography is limited by their relatively low glass transition temperature.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 30, 1996
- Accession Number
- ADA310762
Entities
People
- Jean Fréchet
- Jennifer M. Havard
- Kenneth J. Wynne
Organizations
- Cornell University