Electrochemical Digital Etching: Atomic Level Studies of CdTe(100).
Abstract
Atomic level control in the etching of CdTe(100) is being investigated, in an attempt to develop an electrochemical digital etching procedure. In principle, surface atoms on the crystal should show higher reactivity than those contained on the interior, due to their decreased coordination. Electrochemical oxidation in 50 mM K2SO4, resulted in removal of the surface Cd atoms and a tellurium enriched surface, as observed by Auger electron spectroscopy. Subsequent reduction at -1.8V reduced the surface excess of Te, and returned the surface composition to stoichiometric. Selection of an appropriate potential for the oxidation of surface cadmium atoms was complicated by the observation that bulk CdTe is oxidized at potentials close to that used to oxidize the surface cadmium atoms.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 25, 1996
- Accession Number
- ADA310782
Entities
People
- Belinda K. Wilmer
- John L. Stickney
- Tom A. Sorenson
Organizations
- University of Georgia