Silicon Crystal Heating and Thermocouple Mounting Designs.

Abstract

New mounting methods for a silicon crystal and a thermocouple are described. The sample mounted in this design produced a very uniform temperature distribution when resistively heated. Deviations between the silicon temperature and the mounted thermocouple temperature have been measured. Metal contamination on the surface of the sample mounted with a thermocouple by the new methods was found to be below the detection limit of Auger electron spectroscopy. In addition, the emissivity data at 0.65 micrometers for silicon as a function of temperature has been fitted to a useful equation.

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Document Details

Document Type
Technical Report
Publication Date
Jun 12, 1996
Accession Number
ADA310973

Entities

People

  • H. Nishino
  • V. A. Ukraintsev
  • Wenjie Yang
  • Wolfgang J. Wolfgang J. Choyke
  • Z. Dohnalek

Organizations

  • University of Pittsburgh

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemistry
  • Contamination
  • Detection
  • Electron Spectroscopy
  • Electrons
  • Emissivity
  • Equations
  • High Temperature
  • Materials
  • Measurement
  • Metals
  • Military Research
  • Optical Pyrometers
  • Pyrometers
  • Spectroscopy

Fields of Study

  • Physics

Readers

  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems