Study of Surface Processes During Growth of Epitaxial Boron Nitride.
Abstract
The surface reactions of diborane and ammonia with the Ni(100) substrate have been studied. Diborane decomposes to boron on the surface and upon annealing forms an Ni2B phase on the surface. Under appropriate conditions, BN can be formed when the surface is doped with both diborane and ammonia. The boron nitride so formed has been identified as the hexagonal phase of boron nitride. Additional studies on other substrates are planned in order to look for circumstances in which cubic BN can be formed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1996
- Accession Number
- ADA311192
Entities
People
- D. W. Greve
Organizations
- Carnegie Mellon University