Mathematical Processing for Simulation and Control of Semiconductor Processing.
Abstract
As indicated by its title, the project had three main thrust areas, namely modeling, simulation, and control of processes that are encountered in Semiconductor manufacturing applications. The key common theme of these areas was the use of detailed, first-principles, physical models to predict the process behavior under various conditions. Such an approach is currently considered as an attractive alternative for empirical models whose validity is limited by the range of testing conditions.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1996
- Accession Number
- ADA311752
Entities
People
- K. S. Tsakalis
- P. E. Courch
Organizations
- Arizona State University