Scanning Probe Microscope for Ultra-High Resolution Nanoscale Electron and Near-Field- Optical Lithographies and Metrology.

Abstract

We purchased a scanning probe microscope (SPM), that can operate as an atomic force microscope (AFM), a scanning tunneling microscope (STM), and magnetic force microscope (MFM), and have the hardware and software necessary for ultra-high resolution lithography and alignment. The equipment has played a key role to our ongoing research programs in nanostructures and nanodevices sponsored by ARO as well other agencies such as ONR, ARPA, and NSF. Using the instruments, we studied the topologies of a variety of sub-20 nm structures and the magnetic properties of magnetic nanostructures, which are a new material system and can strongly impact future magnetic recording. Finally, we have used the instrument as a lithography tool.

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Document Details

Document Type
Technical Report
Publication Date
Aug 26, 1996
Accession Number
ADA313763

Entities

People

  • Stephen Y. Chou

Organizations

  • University of Minnesota

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • High Resolution
  • Lithography
  • Magnetic Forces
  • Magnetic Properties
  • Materials
  • Microscopes
  • Nanomaterials
  • Nanoscale Devices
  • Nanostructures
  • Near Field
  • Photolithography
  • Scanning

Fields of Study

  • Physics

Readers

  • Defense Technology Research and Development.
  • Nanoscale Plasmonic Nanotechnology
  • Research Science/Academic Research

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene