Nanofabrication and High-Speed, Nanoscale, Electronic and Optoelectronic Devices.
Abstract
The research project has achieved six significant results: (1) fabrication of 10 nm Si pillars array and the first observation of photoluminescence from the Si pillar array fabricated by nanolithography; (2) a new MSM photodetector structure that can achieve 140 GHz in Si -- the fastest photodetectors in crystal Si. (3) proposal and demonstration of a new planar field-induced quantum dot transistor, and observation of interplay of quantum effects and Coulomb effects; (4) the first observation of bias-induced resonant tunneling peak splitting in a quantum dot; (5) demonstration of a new quantum wave bandstop filters, and (6) demonstration of silicon single electron and single Hole Quantum-dot transistors that have operation temperature above 100K.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 23, 1996
- Accession Number
- ADA313794
Entities
People
- Stephen Y. Chou
Organizations
- University of Minnesota