Formation of Transition Element Nitride Coatings on Steels Using Elevated-Temperature PSII.
Abstract
Under the auspices of the U.S. Army grant we have made considerable strides in all aspects of PSII technology. We have developed a fundamental understanding of plasma physics issues such as sheath propagation, secondary electron emission and heat transfer in targets. These studies have a direct relevance to practical issues such as dose uniformity and batch processing feasibility of PSII To monitor the ion species and their interactions in-situ we have designed and developed a electric field analyzer and are currently installing a LIF system. We have developed a RF plasma source for the long IBED runs required to produce thick coatings.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1995
- Accession Number
- ADA314246
Entities
People
- John R. Conrad
Organizations
- University of Wisconsin–Madison