Microelectronics and Materials Research Equipment.
Abstract
This report summarizes the actions and progress in equipping the microelectronics and materials research programs at The University of Texas at Austin. The Department of Defense provided $6,000,000 towards research equipment purchases for the completion of the research facilities. The University of Texas at Austin had already invested $34 million to build a new 135,000 square foot facility and partially equipped it using $10 million. The $6.0 million of DoD funds completed the acquisition of the equipment necessary to fully utilize the new facility. The equipment has been used to conduct research in the areas of advanced epitaxial growth techniques involving remote-plasma enhanced growth, laser enhanced growth, and rapid thermal processing applied to chemical vapor deposition; advanced epitaxial growth techniques for multilayer, compound semiconductor heterostructures using molecular beam epitaxy and organometallic vapor phase epitaxy techniques; interconnect metallization; metal/polymer packaging structures; structured microwave impedance surfaces; nanoheterogeneous amorphous thin films; and spin valve effects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1996
- Accession Number
- ADA315842
Entities
People
- Dale E. Klein
Organizations
- University of Texas at Austin