(AASERT-92) Development of a New High-Resolution Optic for Soft X-Ray Imaging.
Abstract
The design of a partial Schwarzschild objective lens is given for a soft x-ray reflection imaging microscope. The system has a magnification of 200x with an object spatial resolution of less than 100nm, and a depth of focus of the system of + or - 0.5 micrometers. The parameters of the objective lens consisted of two spherical mirrors are evaluated and optimized at a wavelength of 135A to obtain diffraction limited imaging over a 25 micrometers field size. The feasibility of using aspheric mirrors to improve the image quality is investigated. The field of view could reach to 40 micrometers if the spherical optic is replaced with aspheric optic. Diffractive optics is also discussed briefly due to the fabrication problems of aspheric mirrors. Either of the optic in this paper will be coated with Mo:Si multilayer reflecting surfaces to obtain high optical efficiency.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1996
- Accession Number
- ADA318404
Entities
People
- William T. Silfvast
Organizations
- University of Central Florida