Oxide Substrates for GaN Thin Film Growth.

Abstract

We started the project a year ago to look for the feasibility of using alternative oxide lattice matching substrates for GaN thin film growth. In this contract, we are able to optimize the growth process to produce uncracked single crystals of LAO and LGO for substrate fabrication. We successfully grew LAO up to 50mm in diameter and LGO up to 40 mm in diameter. We have fabricated double-sided polished substrate wafers for testing.

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Document Details

Document Type
Technical Report
Publication Date
Oct 03, 1996
Accession Number
ADA318413

Entities

People

  • Bruce Chai

Tags

DTIC Thesaurus Topics

  • Acids
  • Contracts
  • Crystal Growth
  • Crystal Lattices
  • Crystals
  • Diameters
  • Fabrication
  • Films
  • Light Sources
  • Materials
  • Phase Transformations
  • Scattering
  • Single Crystals
  • Substrates
  • Thin Films
  • Transitions
  • X Rays

Readers

  • Semiconductor Device Technology
  • Structural Health Monitoring of Composite Structures.
  • Thin Film Deposition Science.