Compound Semiconductor Electronics and Photonics.
Abstract
This proceedings volume is the record from a Materials Research Society symposium covering a wide range of activity in the III-V compound semiconductor electronics and photonics arena. In particular, processing modules such as wet an dry etching, ohmic and Schottky contact formation, ion implantation, annealing and dielectric deposition, along with the performance of completed devices such as long- and short-wavelength laser diodes, VCSELs, QWIPs, heterostructure field effect transistors and heterostructure bipolar transistors are discussed. Summaries of these topics were provided by invited review papers, while contributed and poster papers described work in progress.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1996
- Accession Number
- ADA318423
Entities
People
- Robert H. Pachavis
Organizations
- Materials Research Society