High Performance Ultrafast Photodetectors.
Abstract
We report spectral and high-speed measurement results on resonant cavity enhanced (RCE) Schottky photodiodes. The Schottky metal contact is semi-transparent and provides the top mirror reflectivity. We demonstrated by simulations that the detector responsivity can be optimized by using a dielectric coating on top of the metal contact. The novel concept of combining a dielectric impedance matching layer with the semi-transparent metal mirror drastically improves the expected quantum efficiency of RCE Schottky photodiodes. Simulations in GaAs/InGaAs material system predicted more than 70% quantum efficiency for an absorbing region of O.13um. The devices were fabricated by using a microwave compatible process. On-wafer high-speed measurements yielded a 18 Ps pulse width corresponding to a 3-dB bandwidth of 20 GHz. We also report on our efforts on polarization sensing photodetectors.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1996
- Accession Number
- ADA318865
Entities
People
- M. S. Ünlü
Organizations
- Boston University