Nonequilibrium Plasmas: Development and Application of Bulk and Near Surface Laser Diagnostics for Plasma Processing.

Abstract

The two-photon laser induced fluorescence (TALIF) diagnostic has been developed and/or applied to plasma processing systems involving H, 0, and N atoms. Based upon TALIF data, models have been developed for the spatial and temporal variation of the absolute atomic concentrations in H2, 02, and N2 plasmas. The portability of the TALIF diagnostic has been demonstrated. Limitations of the technique due to stimulated emission and fluorescence quenching have been investigated and procedures developed to minimize their effects.

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1996
Accession Number
ADA320587

Entities

People

  • A. Tserepi
  • B. L. Preppernau
  • T. A. Miller

Organizations

  • Ohio State University

Tags

DTIC Thesaurus Topics

  • Amplifiers
  • Emission
  • Fluorescence
  • Laser Applications
  • Laser Diagnostics
  • Laser Induced Fluorescence
  • Lasers
  • Light Amplifiers
  • Light Sources
  • Luminescence
  • Optical Equipment
  • Optical Phenomena
  • Quenching

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Parallel and Distributed Computing.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers