Microcontamination Sensor for VLSI Semiconductor Manufacturing.

Abstract

Feasibility demonstration of a trace-level water vapor sensor has been performed in Phase 1. The sensor is critically needed in semiconductor industry, where trace concentrations of water in highly reactive gases used in Very Large Scale Integration (VLSI) manufacturing decrease significantly the yield of IC chips produced. The sensor described is based on optical spectroscopy in the middle infrared region, and uses a novel laser source, based on nonlinear frequency conversion. In Phase 1 we have demonstrated both the feasibility of producing such a source (diode laser-pumped, room-temperature operation), and the feasibility of its application for sensitive frequency-modulation spectroscopy of water vapor in the middle infrared region. The results achieved open up the potential to develop a novel optical microsensor capable of reaching the required ultra-high detection sensitivity in a package suitable for use in industrial environments.

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Document Details

Document Type
Technical Report
Publication Date
Jan 23, 1997
Accession Number
ADA321189

Entities

People

  • Pajo Vujkovic-cvijin

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Conversion
  • Detection
  • Detectors
  • Frequency
  • Frequency Conversion
  • Intermediate Infrared Radiation
  • Large Scale Integration
  • Laser Diodes
  • Laser Spectroscopy
  • Lasers
  • Nonlinear Optics
  • Semiconductor Lasers
  • Semiconductor Manufacturing
  • Semiconductors
  • Spectroscopy
  • Very Large Scale Integration
  • Water Vapor

Readers

  • Integrated Circuit Design and Technology.
  • Molecular Photonics/Laser Physics
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics
  • Microelectronics - Microelectromechanical Systems