Materials Processing and Manufacturing Technologies for Diamond Substrate Multichip Modules (DSMCM).
Abstract
The research carried out in this program has focused on the analyses of the transport, kinetic, and thermodynamic processes taking place during diamond deposition in direct current and hot-filament reactors. The research carried out may be grouped into four broad categories: (1) development of multistep chemical mechanisms for the deposition of diamond, graphite, and point defects; (2) development and execution of detailed reactor-scale models; (3) development and execution of simplified, analytical reactor-scale models; and (4) development of kinetic and thermodynamic models for diamond nucleation and the early stages of growth.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 26, 1997
- Accession Number
- ADA322108
Entities
People
- David S. Dandy
Organizations
- Colorado State University