Synthesis of Ceramics from Solutions: Functionally Graded Composites, NanoComposites and Single Crystal Thin Films.
Abstract
A polyvinylmethylsilane precursor has been used for the epitaxial growth of SiC thin films on 6H-SiC single crystal substrates. The films were prepared by dipping the single crystalline 6H-SiC substrates into the precursor polymer solution with subsequent thermal treatments at different temperatures. Transmission electron microscopy (TEM) was used to characterize the microstructure and chemistry of the different SiC films. At 1100 deg C, the film was amorphous and contained substantial oxygen. At 1600 deg C, an epitaxial, single crystalline Beta-SiC film was observed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 28, 1997
- Accession Number
- ADA322542
Entities
People
- Fred F. Lange
Organizations
- University of California, Santa Barbara