Micromachined Shear Sensors for Fluid Flows.

Abstract

The three year program focused on modeling of fluid mechanics in micromachined systems. The program supported a graduate student at MIT (Ed Piekos). The program was successful in exploring the effects of rarefaction and the use of different computational tools for analyzing and simulating flows in MEMS devices.

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Document Details

Document Type
Technical Report
Publication Date
May 15, 1997
Accession Number
ADA326157

Entities

People

  • Kenneth S. Breuer
  • Martin A. Schmidt

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Biomedical
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Boundary Layer
  • Computational Fluid Dynamics
  • Computational Science
  • Fluid Dynamics
  • Fluid Flow
  • Gas Dynamics
  • Gas Flow
  • Geometry
  • Hydrodynamics
  • Mechanical Properties
  • Mechanics
  • Microelectromechanical Systems
  • Monte Carlo Method
  • Spacecraft
  • Three Dimensional
  • Turbulent Mixing
  • Two Dimensional

Readers

  • Computational Fluid Dynamics (CFD)
  • Integrated Circuit Design and Technology.
  • STEM Education